Equipment Selection Reference (Overview)
In semiconductor Front-End manufacturing, the types of process gases dictate the safety specifications for facility monitoring equipment. For conventional inert gases (like N2, Ar, CDA), standard models are sufficient. However, for flammable or explosive gases (like H2, silane) and specific hazardous gases (like CO2), the ZHGC-101-02 particle counter must be selected. Zolixtech provides semiconductor fabs with a full matrix of 150psig native high-pressure particle monitoring solutions, including the ZHGC-101-01 and ZHGC-101-02, ensuring absolute production line safety while optimizing lifecycle costs.
1. Why Specific Scenarios Require the ZHGC-101-02
Semiconductor fab process pipelines carry a large amount of high-purity bulk and specialty gases. When detecting flammable/explosive gases like high-purity hydrogen (H2), or gases like CO2, equipment failures can trigger serious safety incidents. Therefore, equipment deployed in hazardous areas must feature comprehensive safety designs, just like the ZHGC-101-02.
2. Core Differences and Application Scenarios
Rationally planning deployment based on gas types is key for balancing safety and cost. The ZHGC-101-02 is backward compatible—it measures both hazardous and inert gases.
- Applicable Gas Types:
ZHGC-101-01 is for inert/non-hazardous gases; ZHGC-101-02 is dedicated to flammable/explosive gases and CO2, while also measuring all inert gases. - Physical Architecture Design:
ZHGC-101-01 uses a standard industrial sealed enclosure; ZHGC-101-02 uses a high-strength flameproof enclosure (Ex d). - Deployment Areas:
ZHGC-101-01 is deployed in CQC RQC, standard VMB/VMP valve boxes; ZHGC-101-02 is used in CQC RQC, Gas Rooms, and hydrogen/hazardous gas POU nodes.
3. Zolixtech's Full Matrix Solutions
- No Compromise on Performance:
Both adopt the 150psig (1.0 MPa) native high-pressure direct-connection optical cavity, delivering 0.1μm / 0.1 CFM accuracy. - Safety First Design:
The ZHGC-101-02 enclosure guarantees isolation and blocks spark leakage in hazardous gas environments. - Cost Efficiency:
Deploying the ZHGC-101-01 for inert gases and the ZHGC-101-02 for core hazardous pipelines maximizes TCO reduction.
4. Conclusion
The ZHGC-101-01 and ZHGC-101-02 are purpose-built for different process gases. Zolixtech provides fabs with optimal selections with uncompromised performance and no safety blind spots.